The AVI Photomask Metrology System
Metrology System User Manual: (Right-click to save the file)
Metrology System Release Notes
Version 3.0 Release Notes (printer-friendly)
Metrology System Troubleshooting Printer-friendly version
No image from the inspection tool (KLA or other).
Check all video connections, try swapping cables. 90% of video problems are caused by bad connectors.
Run the test program, "C:\Flashbus\FBG\FBG32.exe". If you see an image here, but not in Photo32, then check the Digitizer Setup.
If the video connections are good and even FBG32.exe doesn't show an image, then try swapping the video capture board (Contact AVI).
Can't see dim holes, even when using "contrast" command.
Increase the brightness of the AVI monitor.
Measurements are erratic.
Make sure you are marking the defects correctly.
Make sure that the Reticle Inspection System contrast and brightness are set to their defaults.
Make sure that the RIS is operating at the proper magnification and that the Pixels per Micron is correct in the System Setup.
KLA351 & Starlight: 8000X total magnification; 18 pixels/micron
KLA353UV & Starlight-UV: 8000X total magnification; 21.5 pixels/micron
KLA2xx: 10-12 pixels/micron
Measurements have started coming up wrong.
Check that magnification is correct.
If a maintenance operation was performed on the inspection tool, then AVI may need recalibration.
Make sure that the contrast and brightness on the inspection tool are being set to "normal" for all measurements.
Error message comes up on the AVI screen or the computer hangs (doesn't respond).
Ignore it: press [OK].
Reboot the computer. Windows should be rebooted at least weekly.
If it returns consistently, then reboot the computer. If it still comes up consistently, contact your local PC maintenance team.
If your PC expert says the PC is ok, then contact AVI.
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AVI - Automated Visual Inspection
952 South Springer Road
Los Altos, CA, 94024 U.S.A.
+1 650-941-6871 Phone
+1 650-941-4821 Fax